Sputtered TiN films for superconducting coplanar waveguide resonators
نویسندگان
چکیده
S. Ohya,1, a) B. Chiaro,2 A. Megrant,2, 3 C. Neill,2 R. Barends,2 Y. Chen,2 J. Kelly,2 D. Low,2 J. Mutus,2 P. J. J. O’Malley,2 P. Roushan,2 D. Sank,2 A. Vainsencher,2 J. Wenner,2 T. C. White,2 Y. Yin,2 B. D. Schultz,1 C. J. Palmstrøm,1, 3 B. A. Mazin,2 A. N. Cleland,2 and John M. Martinis2, b) Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106-9560, USA Department of Physics, University of California, Santa Barbara, California 93106, USA Department of Materials, University of California, Santa Barbara, California 93106-9530, USA
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